000 01023nam a22002777a 4500
005 20090519141420.0
008 081120t xxu||||| |||| 00| 0 eng d
010 _aENG-93601
020 _a9788120337527
_c525.00
035 _aEN-77134
037 _bDBAD / PUB
037 _bPriyanka Prakashan
040 _adpl
_bEnglish
082 _a621.381
245 _aMEMS and MOEMS technology and applications /
_cedited by P. Rai-Choudhury
260 _aNew Delh
_bPHI Learning
_c2009
270 _aM-97, Connaught Circus
_bNew Delhi
_e110001
300 _axi, 520p.
_c25cm(pbk)
500 _aIncludes references and index
650 _aMicroelectromechanical systems
650 _aOptoelectronic devices
700 _aRai-Choudhury, P.
942 _2ddc
_cEN
_mMEM
_h621.381
999 _c26573
_d26573