000 00625 a2200181 4500
999 _c183366
_d183366
005 20211229143201.0
010 _aENG-130528
020 _a978-93-5460-122-4
_c899.00
035 _aEN-114060
037 _bDBAD/PUB
082 _a621.381
_b1
100 _aKim, Eun Sok
245 _aFundamentals of Microelectromechanical Systems (MEMS):
_cEun Sok Kim
260 _aChennai
_bMcGraw Hill Education(india) Private Limited
_c2021
270 _aAnjana Complex No.5 /90 A, Butt Road, St. Thomas Mount
_bChennai
_e600016
300 _a xviii, 396p.
_c24cm (pbk)
_b index
942 _adpl
_cEN
_2ddc
_h621.381
_mKIM