00939nam a22002657a 450000500170000000800410001701000140005802000260007203500130009803700150011103700230012604000180014908200120016724500770017926000350025627000470029130000270033850000350036565000350040065000270043570000230046294200260048599900170051195201450052820090519141420.0081120t        xxu||||| |||| 00| 0 eng d  aENG-93601  a9788120337527c525.00  aEN-77134  bDBAD / PUB  bPriyanka Prakashan  adplbEnglish   a621.381  aMEMS and MOEMS technology and applications /cedited by P. Rai-Choudhury  aNew Delh bPHI Learning c2009  aM-97, Connaught Circus bNew Delhie110001  axi, 520p. c25cm(pbk)   aIncludes references and index   aMicroelectromechanical systems  aOptoelectronic devices  aRai-Choudhury, P.   2ddccENmMEMh621.381  c26573d26573  00102ddc40718NFICaDBADbDBADd2009-05-19eDBAD /  PUBg525.00l0o621.381 MEMpEN-77134r2009-05-19 00:00:00t1v525.00w2009-05-19yEN