TY  - BOOK
AU  - Rai-Choudhury, P. 
TI  - MEMS and MOEMS technology and applications
SN  - 9788120337527
U1  - 621.381 
PY  - 2009///
CY  - New Delh 
PB  - PHI Learning 
KW  - Microelectromechanical systems
KW  - Optoelectronic devices
N1  - Includes references and index
ER  -