TY  - GEN
AU  - Kim, Eun Sok
TI  - Fundamentals of Microelectromechanical Systems (MEMS)
SN  - 978-93-5460-122-4
U1  - 621.381 
PY  - 2021///
CY  - Chennai
PB  - McGraw Hill Education(india) Private Limited
ER  -